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Real time observation of initial thermal oxidation using O2 gas on Si(0 0 1) surface by means of synchrotron radiation Si-2p photoemission spectroscopy
Akitaka Yoshigoe, Kousuke Moritani, Yuden TeraokaVolume:
216
Year:
2003
Language:
english
Pages:
7
DOI:
10.1016/s0169-4332(03)00451-3
File:
PDF, 165 KB
english, 2003