The influence of tip performance on scanning probe...

Applied Surface Science 2004 Vol. 221; Iss. 1-4

The influence of tip performance on scanning probe lithography

Hualan Zhou, Zhuang Li, Aiguo Wu, Jianping Zheng, Jian Zhang, Shifa Wu
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Volume:
221
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/s0169-4332(03)00944-9
File:
PDF, 314 KB
english, 2004
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