Thermal stability of W1 − xSixSi multilayer reflective...

Applied Surface Science 1996 Vol. 106; Iss. none

Thermal stability of W1 − xSixSi multilayer reflective coatings under high intensity excimer laser pulses

E. D'Anna, A. Luches, M. Martino, M. Brunel, E. Majkova, S. Luby, R. Senderak, M. Jergel, F. Hamelmann, U. Kleineberg, U. Heinzmann
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Volume:
106
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(96)00365-0
File:
PDF, 318 KB
english, 1996
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