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Kinetics of dissociative adsorption of dichlorosilane on Si(100)2 × 1
Hitoshi Sakamoto, Yuji Takakuwa, Toyokazu Hori, Tetsuhiro Horie, Maki Suemitsu, Nobuo MiyamotoVolume:
107
Year:
1996
Language:
english
Pages:
7
DOI:
10.1016/s0169-4332(96)00485-0
File:
PDF, 598 KB
english, 1996