Pulsed laser deposition of tantalum oxide thin films
Zhou Mingfei, Fu Zhengwen, Yang Haijun, Zhang Zhuangjian, Qin QizongVolume:
108
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(96)00605-8
File:
PDF, 212 KB
english, 1997