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Nitrogen- and ammonia-plasma nitridation of hydrogenated amorphous silicon
Atsushi Masuda, Shuji Yoshimoto, Yasuto Yonezawa, Akiharu Morimoto, Minoru Kumeda, Tatsuo ShimizuVolume:
113-114
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0169-4332(96)00783-0
File:
PDF, 421 KB
english, 1997