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The effect of ‘warm’ gas scattering on the deceleration of energetic atoms: Monte Carlo study of the sputter-deposition of compounds
Takeo Nakano, Isao Mori, Shigeru BabaVolume:
113-114
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(96)00817-3
File:
PDF, 409 KB
english, 1997