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Structure and thermal behavior of N containing a-C films obtained by high energy ion beam deposition
E.B Halac, H Huck, G Zampieri, R.G Pregliasco, E Alonso, M.A.R de BenyacarVolume:
120
Year:
1997
Language:
english
Pages:
10
DOI:
10.1016/s0169-4332(97)00230-4
File:
PDF, 176 KB
english, 1997