Effects of intermediate zinc pulses on properties of TiN...

Applied Surface Science 1997 Vol. 120; Iss. 3-4

Effects of intermediate zinc pulses on properties of TiN and NbN films deposited by atomic layer epitaxy

Mikko Ritala, Timo Asikainen, Markku Leskelä, Janne Jokinen, Reijo Lappalainen, Mikko Utriainen, Lauri Niinistö, Eero Ristolainen
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Volume:
120
Year:
1997
Language:
english
Pages:
14
DOI:
10.1016/s0169-4332(97)00387-5
File:
PDF, 1.09 MB
english, 1997
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