Dopant and fluence effects on the ablation of silicon...

Applied Surface Science 1998 Vol. 127-129; Iss. none

Dopant and fluence effects on the ablation of silicon surfaces under pulsed CO2 laser irradiation

Tetsuo Sakka, Kokichi Hotta, Satoshi Akiba, Akira Kuroyanagi, Yukio H. Ogata, Mahito Mabuchi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
127-129
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(97)00612-0
File:
PDF, 111 KB
english, 1998
Conversion to is in progress
Conversion to is failed