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TiN coating to three-dimensional materials by PBII using vacuum titanium arc plasma
M Sano, T Teramoto, K Yukimura, T MaruyamaVolume:
128-129
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(00)00580-6
File:
PDF, 214 KB
english, 2000