Kinetics of the pulsed erosion deposition process induced...

Kinetics of the pulsed erosion deposition process induced by high intensity plasma beams

J Piekoszewski, R Grötzschel, E Wieser, J Stanislawski, Z Werner, W Szymczyk, J Langner
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Volume:
128-129
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(00)00613-7
File:
PDF, 215 KB
english, 2000
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