Preparation of aluminum oxide films by ion beam assisted deposition
I Shimizu, Y Setsuhara, S Miyake, M Kumagai, K Ogata, M Kohata, K YamaguchiVolume:
131
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(00)00823-9
File:
PDF, 172 KB
english, 2000