Effect of transverse current injection during vacuum arc...

Surface and Coatings Technology 2000 Vol. 133-134; Iss. none

Effect of transverse current injection during vacuum arc deposition of TiN

N Parkansky, V Zhitomirsky, B Alterkop, S Goldsmith, R.L Boxman, Yu Rosenberg, Z Barkay
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Volume:
133-134
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(00)00882-3
File:
PDF, 536 KB
english, 2000
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