Bias voltage and incidence angle effects on the structure...

Surface and Coatings Technology 2000 Vol. 133-134; Iss. none

Bias voltage and incidence angle effects on the structure and properties of vacuum arc deposited TiN coatings

V.N. Zhitomirsky, I. Grimberg, L. Rapoport, R.L. Boxman, N.A. Travitzky, S. Goldsmith, B.Z. Weiss
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Volume:
133-134
Year:
2000
Language:
english
Pages:
7
DOI:
10.1016/s0257-8972(00)00884-7
File:
PDF, 2.19 MB
english, 2000
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