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Large area high density plasma source by helical resonator arrays
Se-Geun Park, Beom-hoan O, Minyoung Sohn, Jinwoo KimVolume:
133-134
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(00)00902-6
File:
PDF, 201 KB
english, 2000