Hard nanocomposite Ti–Si–N coatings prepared by DC reactive...

Surface and Coatings Technology 2000 Vol. 133-134; Iss. none

Hard nanocomposite Ti–Si–N coatings prepared by DC reactive magnetron sputtering

L Rebouta, C.J Tavares, R Aimo, Z Wang, K Pischow, E Alves, T.C Rojas, J.A Odriozola
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Volume:
133-134
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(00)00934-8
File:
PDF, 454 KB
english, 2000
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