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Development of plasma-based ion implantation (PBII) techniques at Osaka National Research Institute (ONRI)
Sung-Yong Chun, Akiyoshi Chayahara, Yuji HorinoVolume:
136
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(00)01005-7
File:
PDF, 291 KB
english, 2001