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Chemical and physical sputtering of aluminium and gold samples using Ar–H2 DC-glow discharges
C.V. Budtz-Jørgensen, P. Kringhøj, J.F. Nielsen, J. BøttigerVolume:
135
Year:
2001
Language:
english
Pages:
8
DOI:
10.1016/s0257-8972(00)01085-9
File:
PDF, 361 KB
english, 2001