Synthesis and structure of smooth, superhard TiN/SiNx...

Surface and Coatings Technology 2001 Vol. 146-147; Iss. none

Synthesis and structure of smooth, superhard TiN/SiNx multilayer coatings with an equiaxed microstructure

Yu-Hsia Chen, Kitty W Lee, Wen-An Chiou, Yip-Wah Chung, Leon M Keer
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Volume:
146-147
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(01)01390-1
File:
PDF, 477 KB
english, 2001
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