Recent developments in inverted cylindrical magnetron...

Recent developments in inverted cylindrical magnetron sputtering

David A Glocker, Mark M Romach, Vern W Lindberg
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
146-147
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(01)01487-6
File:
PDF, 182 KB
english, 2001
Conversion to is in progress
Conversion to is failed