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Structure and properties of Al2O3 layers deposited by plasma activated electron beam evaporation
O. Zywitzki, K. Goedicke, H. MorgnerVolume:
151-152
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0257-8972(01)01632-2
File:
PDF, 1.25 MB
english, 2002