Aspects of plasma-enhanced magnetron-sputtered deposition...

Aspects of plasma-enhanced magnetron-sputtered deposition of hard coatings on cutting tools

Ronghua Wei, John J Vajo, Jesse N Matossian, Michael N Gardos
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Volume:
158-159
Year:
2002
Language:
english
Pages:
8
DOI:
10.1016/s0257-8972(02)00289-x
File:
PDF, 1.01 MB
english, 2002
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