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Effect of ammonia nitridation on the microstructure of MoSi2 coatings formed by chemical vapor deposition of Si on Mo substrates
Jin-Kook Yoon, Jong-Kwon Lee, Ji-Young Byun, Gyeung-Ho Kim, Young-Hyun Paik, Jae-Soo KimVolume:
160
Year:
2002
Language:
english
Pages:
9
DOI:
10.1016/s0257-8972(02)00379-1
File:
PDF, 1.46 MB
english, 2002