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Patterning of diamond microstructures on Si substrate by bulk and surface micromachining
Yongqing Fu, Hejun Du, Jianmin MiaoVolume:
132
Year:
2003
Language:
english
Pages:
9
DOI:
10.1016/s0924-0136(02)00266-2
File:
PDF, 1.12 MB
english, 2003