Micro-machined gas sensor array based on metal film...

Sensors and Actuators B: Chemical 2001 Vol. 79; Iss. 2-3

Micro-machined gas sensor array based on metal film micro-heater

Yaowu Mo, Yuzo Okawa, Motoshi Tajima, Takehito Nakai, Nobuyuki Yoshiike, Kazuki Natukawa
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Volume:
79
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0925-4005(01)00871-1
File:
PDF, 295 KB
english, 2001
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