Theory of gas-diffusion controlled sensitivity for thin...

Theory of gas-diffusion controlled sensitivity for thin film semiconductor gas sensor

Go Sakai, Naoki Matsunaga, Kengo Shimanoe, Noboru Yamazoe
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Volume:
80
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0925-4005(01)00890-5
File:
PDF, 208 KB
english, 2001
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