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Micro- and nanopatterning of sensor chips by means of macroporous silicon
A. Kurowski, J.W. Schultze, H. Lüth, M.J. SchöningVolume:
83
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0925-4005(01)01054-1
File:
PDF, 463 KB
english, 2002