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Monolithic membrane valves and diaphragm pumps for practical large-scale integration into glass microfluidic devices
William H Grover, Alison M Skelley, Chung N Liu, Eric T Lagally, Richard A MathiesVolume:
89
Year:
2003
Language:
english
Pages:
9
DOI:
10.1016/s0925-4005(02)00468-9
File:
PDF, 385 KB
english, 2003