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Micromechanical fabrication of robust low-power metal oxide gas sensors
Alois Friedberger, P. Kreisl, E. Rose, G. Müller, G. Kühner, J. Wöllenstein, H. BöttnerVolume:
93
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0925-4005(03)00221-1
File:
PDF, 298 KB
english, 2003