Thermal fatigue modeling of micromachined gas sensors

Sensors and Actuators B: Chemical 2003 Vol. 95; Iss. 1-3

Thermal fatigue modeling of micromachined gas sensors

J Puigcorbé, A Vilà, J.R Morante
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Volume:
95
Year:
2003
Language:
english
Pages:
7
DOI:
10.1016/s0925-4005(03)00538-0
File:
PDF, 275 KB
english, 2003
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