Fabrication of a novel oxygen sensor with CMOS compatible...

Sensors and Actuators B: Chemical 1998 Vol. 46; Iss. 2

Fabrication of a novel oxygen sensor with CMOS compatible processes

Huixian Zhu, Tai-Chin Lo, Ralf Lenigk, Reinhard Renneberg
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Volume:
46
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0925-4005(98)00044-6
File:
PDF, 198 KB
english, 1998
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