Stability and reliability of capacitive-type relative...

Stability and reliability of capacitive-type relative humidity sensors using crosslinked polyimide films

Masanobu Matsuguch, Takaaki Kuroiwa, Tetsuya Miyagishi, Sachiko Suzuki, Tsutomu Ogura, Yoshiro Sakai
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Volume:
52
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0925-4005(98)00255-x
File:
PDF, 101 KB
english, 1998
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