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Recrystallization of polycrystalline silicon films on ceramics by electron beam
Tetsuo Takahashi, Ryuichi Shimokawa, Yasuhiro Matsumoto, Kenichi Ishii, Toshihiro SekigawaVolume:
48
Year:
1997
Language:
english
Pages:
7
DOI:
10.1016/s0927-0248(97)00144-x
File:
PDF, 314 KB
english, 1997