Polycrystalline silicon films prepared by improved pulsed...

Polycrystalline silicon films prepared by improved pulsed rapid thermal annealing

Yuwen Zhao, Wenjing Wang, Feng Yun, Ying Xu, Xianbo Liao, Zhixun Ma, Guozhen Yue, Guanglin Kong
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Volume:
62
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0927-0248(99)00145-2
File:
PDF, 115 KB
english, 2000
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