Absorption of pulsed CO2 laser in silicon and resulting...

Plasmas & Ions 1998 Vol. 1; Iss. 1

Absorption of pulsed CO2 laser in silicon and resulting laser ablation and surface damage formation

Tetsuo Sakka, Satoshi Akiba, Akira Kuroyanagi, Kokichi Hotta, Yukio H. Ogata, Mahito Mabuchi
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Volume:
1
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s1288-3255(99)80003-3
File:
PDF, 959 KB
english, 1998
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