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Effects of substrate cooling in hard magnetic disk sputtering process on protective overcoat and magnetic layer properties
E.V. Anoikin, M.M. Yang, M.T. Sullivan, J.L. Chao, J.W. Ager IIIVolume:
46
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s1359-6454(97)00462-x
File:
PDF, 373 KB
english, 1998