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LIGA Microsystems: Surface Interactions, Tribology, and Coatings
Somuri V. Prasad, Michael T. Dugger, Todd R. Christenson, David R. TallantVolume:
6
Year:
2004
Language:
english
Pages:
10
DOI:
10.1016/s1526-6125(04)70064-x
File:
PDF, 242 KB
english, 2004