FIB-induced damage in silicon

Journal of Microscopy 2004 Vol. 214; Iss. 3

FIB-induced damage in silicon

S. RUBANOV, P. R. MUNROE
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Volume:
214
Year:
2004
Language:
english
Pages:
9
DOI:
10.1111/j.0022-2720.2004.01327.x
File:
PDF, 209 KB
english, 2004
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