ChemInform Abstract: Deposition of Thin Films of Gallium Sulfide from a Novel Liquid Single-Source Precursor, Ga(SOCNEt2)3, by Aerosol-Assisted CVD.
Graeme A. Horley, Mike R. Lazell, Paul O'BrienVolume:
30
Year:
1999
Pages:
1
DOI:
10.1002/chin.199951235
File:
PDF, 33 KB
1999