ChemInform Abstract: GaAs/InGaP Selective Etching in...

ChemInform 2000 Vol. 31; Iss. 1

ChemInform Abstract: GaAs/InGaP Selective Etching in BCl3/SF6 High-Density Plasmas.

D. C. Hays, H. Cho, J. W. Lee, M. W. Devre, B. H. Reelfs, D. Johnson, J. N. Sasserath, L. C. Meyer, E. Toussaint, F. Ren, et al. et al.
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Volume:
31
Year:
2000
Pages:
1
DOI:
10.1002/chin.200001252
File:
PDF, 32 KB
2000
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