Thermal Decomposition of the Oxynitride of Silicon

Journal of the American Ceramic Society 1980 Vol. 63; Iss. 3-4

Thermal Decomposition of the Oxynitride of Silicon

THOMAS C. EHLERT, T. P. DEAN, M. BILLY, J.-C. LABBE
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Volume:
63
Year:
1980
Language:
english
Pages:
2
DOI:
10.1111/j.1151-2916.1980.tb10707.x
File:
PDF, 543 KB
english, 1980
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