ChemInform Abstract: Low-Pressure CVD of Carbon Nitride...

ChemInform Abstract: Low-Pressure CVD of Carbon Nitride Using Triazine-Containing Precursors.

Borislav L. Ivanov, Ludmil M. Zambov, Georgy T. Georgiev, Cyril Popov, Martin F. Plass, Wilhelm Kulisch
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Volume:
31
Year:
2000
Pages:
1
DOI:
10.1002/chin.200007242
File:
PDF, 27 KB
2000
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