![](/img/cover-not-exists.png)
Laser-Chemical Vapor Precipitation of Submierometer Silicon and Silicon Nitride Powders from Chlorinated Silanes
Robert A. Bauer, Robert Smulders, Johanna G. M. Becht, Paul J. van der Put, Joop SchoonmanVolume:
72
Year:
1989
Language:
english
Pages:
4
DOI:
10.1111/j.1151-2916.1989.tb09735.x
File:
PDF, 585 KB
english, 1989