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Electron Microscopy of Defects in Epitaxical β-SiC Thin Films Grown on Silicon and Carbon {0001} Faces of α-SiC Substrates
Karren L. More, Hua Shuang Kong†, Jeffrey T. Glass, Robert F. DavisVolume:
73
Year:
1990
Language:
english
Pages:
6
DOI:
10.1111/j.1151-2916.1990.tb05192.x
File:
PDF, 702 KB
english, 1990