High-Temperature Active Oxidation of Chemically Vapor-Deposited Silicon Carbide in an Ar─O2 Atmosphere
Takayuki Narushima, Takashi Goto, Yasutaka Iguchi, Toshio HiraiVolume:
74
Year:
1991
Language:
english
Pages:
4
DOI:
10.1111/j.1151-2916.1991.tb06803.x
File:
PDF, 406 KB
english, 1991