High-Temperature Active Oxidation of Chemically...

High-Temperature Active Oxidation of Chemically Vapor-Deposited Silicon Carbide in an Ar─O2 Atmosphere

Takayuki Narushima, Takashi Goto, Yasutaka Iguchi, Toshio Hirai
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Volume:
74
Year:
1991
Language:
english
Pages:
4
DOI:
10.1111/j.1151-2916.1991.tb06803.x
File:
PDF, 406 KB
english, 1991
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