Elemental Concentration Profiles in an Oxidized Silicon Nitride Material
Lena K. L. Falk, E. Urban EngstrÖmVolume:
74
Year:
1991
Language:
english
Pages:
7
DOI:
10.1111/j.1151-2916.1991.tb08297.x
File:
PDF, 1011 KB
english, 1991