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Interpretation of the Parabolic and Nonparabolic Oxidation Behavior of Silicon Oxynitride
Jeanette Persson, Per-Olov Käll, Mats NygrenVolume:
75
Year:
1992
Language:
english
Pages:
8
DOI:
10.1111/j.1151-2916.1992.tb04437.x
File:
PDF, 772 KB
english, 1992