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Depletion Effects of Silicon Carbide Deposition from Methyltrichlorosilane
Theodore M. Besmann, Brian W. Sheldon, Thomas S. Moss III, Michael D. KasterVolume:
75
Year:
1992
Language:
english
Pages:
5
DOI:
10.1111/j.1151-2916.1992.tb05529.x
File:
PDF, 444 KB
english, 1992