Effects of SiF4 and NH3 Concentrations on the Low-Pressure CVD of Polycrystalline α-Si3N4
Woo Y. Lee, James R. StrifeVolume:
76
Year:
1993
Language:
english
Pages:
3
DOI:
10.1111/j.1151-2916.1993.tb03822.x
File:
PDF, 260 KB
english, 1993